Ubwato bwo gusukura amabuye y'agaciro
Ubwato bwo gusukura amabuye y’agaciro yitwa quartz ni igikoresho gikoreshwa mu gusukura amabuye y’agaciro mu gihe co guhingura amabuye y’agaciro.
Ibikoresho: 99.99% amabuye y'agaciro
Imvugo
Utuntu dutandukanye
- Uguhangana n'ubushuhe bwinshi
- Uguhangana n'ubumara
- Uguhangana n'ukwambara
- Biroroshe gusukura
Gukoresha: gukuraho ibintu bihumanye
Kumenya neza uburyo bwo gukora ibice vy’ibikoresho vy’ubuhinga bwa semiconductor.
Gusaba
1. Imbere-Isuku ry'Ikwiragira
Ikoreshwa mu gutwara ama wafers biciye mu ntambwe zo gusukura zitose canke zo kwibiza (nk’akarorero, gusukura RCA) kugira ngo hakurweho ibintu bihumanye bifise ubuzima, ivyuma, n’ibintu bihumanye imbere y’uko habaho ugukwiragira kw’ubushuhe bwinshi canke uguhinduka kw’ibinyabuzima.
2. Inyuma-CMP (Ivyuma vy'Imibano) Gusukura
Ifata ama wafers mu gihe c’isuku ry’inyuma y’-gusukura kugira ngo ikureho ibisigazwa vy’ivu n’utunenge two ku ruhande, kugira ngo bibe vyiza cane ku ntambwe zikurikira zo gukora amabuye.
3. Imbere-Iherezo-ry'umurongo (FEOL) Guhingura
Ikoreshwa mu ntambwe zikomeye zo gusukura FEOL aho ivyumba bisukuye cane bisabwa kugira ngo umusemburo w’irembo ukure, gutera ivyatsi, canke gutera ivyatsi.
4. Inyuma-Iherezo-ry'umurongo (BEOL) Gukora
Ishigikira ama wafer mu gihe co gusukura inyuma y'-etch canke inyuma y'-ugutera kugira ngo ikureho photoresist, ibintu biva ku etch, n'ubuhumane bw'ivyuma inyuma y'ugukorana.
5. Gupfunyika biteye imbere
Ishobora gusukura urugero rwa wafer-imbere yo gucapura canke gufatanya mu bipapuro vya 2.5D/3D IC, bikaba vyerekana ko ata kwanduza -kugira ngo habeho ibihuza vyizigirwa.
6. Gukora amashanyarazi y'umuco
Ikoreshwa mu guhingura ivyuma vy’izuba kugira ngo isukure ibikoresho vy’ivyuma vy’i silikoni, igatuma ivyuma vy’imbere bimera neza kugira ngo umuco ushobore gufata neza kandi inguvu zihindurwe neza.
Ibintu
|
Ibiranga umubiri |
Agaciro |
|
Ubusuku |
＞99.99% |
|
Ubunini |
2.2g/santimetero3 |
|
Guseruka |
＞90% |
|
Ubukomezi bwa Mohs |
5.5--6.5 |
|
Intumbero y'uguhinduka |
Degre 1280 |
|
Intumbero yo kworosha |
Degre 1750 |
|
Intumbero yo gusha |
Degre 1250 |
|
Ubushuhe bwihariye (20 - 350 degre ) |
670J/ikiro. urupapuro gw'umutsindo |
|
Ugutwara ubushuhe (degre 20) |
1.4W/m. urupapuro gw'umutsindo |
|
Ubushuhe bujana (w/mk, degre 1000) |
1.0-1.2 |
|
Index y'uguca ibibatsi |
1.4585 |
|
Igitigiri c'ukwaguka kw'ubushuhe |
5.510 -7santimetero/santimetero. urupapuro gw'umutsindo |
|
Ubushuhe - bukora |
1750--2050 |
|
Igihe gito - Ubushuhe bw'Ibikorwa |
Degre 1450 |
|
Igihe kirekire - Ubushuhe bw'Ibikorwa |
Degre 1100 |
|
Ibiranga imiti |
Agaciro |
|
Asidi ishobora guhangana na yo |
Asidi ikomeye (uretse HF), alkali ikomeye, umuti w'ibinyabuzima |
|
Ubushuhe bwinshi Bushobora guhangana n'ubumara |
Birashimishije |
|
Ibirimwo ubuhumane bw'ivyuma |
<5 ppm |
|
Imiterere y'umuyagankuba |
Agaciro |
|
Uguhangana |
7107Ω.cm |
|
Inkomezi zo kwikingira |
250~400Kv/santimetero |
|
Igihoraho c'umuyagankuba |
3.7~3.9 |
|
Igitigiri c'ugufata umuyagankuba |
＜410-4 |
|
Igiharuro c'ugutakaza kw'umuyagankuba |
＜110-4 |
|
Ibiranga ubuhinga |
Agaciro |
|
Inkomezi zo gufatanya |
1100MPa |
|
Inkomezi zo gupfukama |
MPa |
|
Inkomezi zo gukwega |
MPa |
|
Igipimo ca Poisson |
0.14~0.17 |
|
Igiharuro ca Young |
72000 MPa |
|
Igipimo c'ugukemura |
31000 MPa |
Uburyo bwo gusukura
Gusukura mu mazi:
Shira iyo wafer mu bwato bwo gusukura, hanyuma uyibike mu mazi yo gusukura, hanyuma wongere ugukorana hagati y’amazi yo gusukura n’aho iyo wafer iri hejuru mu guterura ubwato bwo gusukura kugira ngo bube bwiza mu gusukura.
Gusukura n'imiti:
Hagarara ubwato bwo gusukura bugororotse mu cumba co gutera imiti, hanyuma ukoreshe iyo nzira kugira ngo ufumbire amazi yo gusukura ku ruhande rw’ivyo bipande kugira ngo ukureho ibintu bihumanye. .
Akamaro ko gusukura ubwato:
- Kumenya neza isuku ry’ibipande: Igipande c’ibipande gisukuye ni ikintu gihambaye cane kugira ngo hakorwe neza ibipande vy’ibipande vy’ibipande, kandi ubwato bwo gusukura burafise uruhara runini mu gusukura.
- Kumenya neza ko ibice vy’umubiri bishobora kwizigirwa: Kumenya neza ko ibice vy’umubiri bishobora kwizigirwa no kugabanya utunenge two mu bikoresho mu gukuraho ibintu bihumanya ivyuma biri ku ruhande.
- Gutuma ibice vy’umubiri bikora neza: Gutuma ibice vy’umubiri bigira ubusuku bwiza, gutyo bigatuma ibice vy’umubiri bigira umwimbu mwiza.
Imisoro ishushe: Ubwato bwo gusukura amabuye y'agaciro, Ubushinwa abahinguzi b'ubwato bwo gusukura amabuye y'agaciro, abagurisha, uruganda
Wohereze Itohoza
Ushobora Kandi
