Igipande c'amabuye y'agaciro
Ivyuma vy’amabuye y’agaciro vy’amabuye y’agaciro (Quartz Wafer Substrates) ni ivyuma vy’amabuye y’agaciro bikozwe ahanini mu mabuye y’agaciro (SiO2), akoreshwa cane mu bikoresho bifata umuriro, mu bikoresho vy’amaso, mu bikoresho vy’amaso (MEMS), mu bikoresho vy’amaso, no mu bindi bikorwa.
Imvugo
Imiterere y'ibikoresho
- Ubusuku burengeye:Mu bisanzwe ikozwe mu mabuye y’agaciro yitwa quartz (nk’akarorero, fused silica), afise ubusuku bwinshi cane ( Burengeye canke bungana na 99,99%) n’ubuhumane buke cane kugira ngo ntihagire ico bukoze ku mikorere y’ibikoresho.
- Ugushikama kw'ubushuhe:Igitigiri gito c’ukwaguka kw’ubushuhe (≈0.55×10−6/℃) n’ubushobozi bwo guhangana n’ubushuhe bwinshi- (igipimo co kworosha ~1600℃), bibereye ibikorwa vy’ubushuhe bwinshi-.
- Ibikorwa vy'amaso:Urutonde rwagutse rwo gutanga (UV gushika kuri IR), n’ugutanga UV kudasanzwe, vyiza ku mafoto, ama lens, n’ibindi.
- Ubudakora bw'imiti:Ishobora guhangana n’aside n’amazi (uretse aside hydrofluorique), ibereye mu bikorwa vyo gucapura bitose.
- Ukwikingira umuyagankuba:High resistivity (>1016 Ω·cm), vyiza cane ku bikoresho vyo gukingira canke ibikoresho vy’incuro nyinshi-.
Ibisabwa
Uguhingura ibikoresho bijana umuyagankuba
- Ibikoresho vy'amafoto
- Ibice vy'ubuhinga bwa EUV
- Ivyuma bikoreshwa mu gutunganya
Ivy'amafoto n'ivy'amaso
- Ivyuma birongora umuvuduko w'amaso
- Gushiramwo umuyagankuba
- Ibice vy'ubuhinga bwa quantum
Ibisabwa vyihariye
- Ishingiro ry'ijwi rya MEMS
- Amaso y'ikirere
- Uburyo bwa laser bw'inguvu nyinshi-
Uburyo bwo gukora
- Ibikoresho bitagira agaciro:Ivuye mu gutera umwotsi (nk’akarorero, SiCl4 oxidation) canke gusukura amabuye y’agaciro yitwa quartz kavukire.
- Gufukura no guhingura:Ubushuhe bwinshi-gufukura hakurikijwe ugukonja mu bice canke gukwegwa mu nkoni.
- Gukata:Bicapwa mu bipande bitobito hakoreshejwe amaseru y’intsinga y’amadayimoni canke gucapura n’umuyagankuba.
- Gusya no gusukura:Ivyo gusukura bikoresheje ubuhinga bw’imiti (CMP) bishika ku rugero rwa nanometer-rw’ugusenyera.
- Gusukura no gusuzuma:Gukuraho ibice n’ibintu bihumanya ivyuma, hanyuma hakaza gupima ubumuga n’ibipimo.
Ibintu
|
Ibiranga umubiri |
Agaciro |
|
Ubusuku |
＞99.99% |
|
Ubunini |
2.2g/santimetero3 |
|
Guseruka |
＞90% |
|
Ubukomezi bwa Mohs |
5.5--6.5 |
|
Intumbero y'uguhinduka |
Degre 1280 |
|
Intumbero yo kworosha |
Degre 1750 |
|
Intumbero yo gusha |
Degre 1250 |
|
Ubushuhe bwihariye (20 - 350 degre ) |
670J/ikiro. urupapuro gw'umutsindo |
|
Ugutwara ubushuhe (degre 20) |
1.4W/m. urupapuro gw'umutsindo |
|
Ubushuhe bujana (w/mk, degre 1000) |
1.0-1.2 |
|
Index y'uguca ibibatsi |
1.4585 |
|
Igitigiri c'ukwaguka kw'ubushuhe |
5.510 -7santimetero/santimetero. urupapuro gw'umutsindo |
|
Ubushuhe - bukora |
1750--2050 |
|
Igihe gito - Ubushuhe bw'Ibikorwa |
Degre 1450 |
|
Igihe kirekire - Ubushuhe bw'Ibikorwa |
Degre 1100 |
|
Ibiranga imiti |
Agaciro |
|
Asidi ishobora guhangana na yo |
Asidi ikomeye (uretse HF), Alkali ikomeye, umuti w'ibinyabuzima |
|
Ubushuhe bwinshi Bushobora guhangana n'ubumara |
Birashimishije |
|
Ibirimwo ubuhumane bw'ivyuma |
<5 ppm |
|
Imiterere y'umuyagankuba |
Agaciro |
|
Uguhangana |
7107Ω.cm |
|
Inkomezi zo kwikingira |
250~400Kv/santimetero |
|
Igihoraho c'umuyagankuba |
3.7~3.9 |
|
Igitigiri c'ugufata umuyagankuba |
＜410-4 |
|
Igiharuro c'ugutakaza kw'umuyagankuba |
＜110-4 |
|
Ibiranga ubuhinga |
Agaciro |
|
Inkomezi zo gufatanya |
1100MPa |
|
Inkomezi zo gupfukama |
MPa |
|
Inkomezi zo gukwega |
MPa |
|
Igipimo ca Poisson |
0.14~0.17 |
|
Igiharuro ca Young |
72000 MPa |
|
Umubare wo gukemura |
31000 MPa |
IBIBAZO bibazwa
IKIBAZO CA 1: Ni ubuhe bunini bw’ibikoresho vy’amabuye y’agaciro vy’amabuye y’agaciro bishobora gukoreshwa?
I: Ibikorwa bisanzwe bishika ku 300mm, n’ibigereranyo vya 450mm bishobora gukoreshwa mu gukora ubushakashatsi n’iterambere.
IKIBAZO CA 2: Woba ushobora gutanga imirongo y’uburemere bubereye?
A: Ego - dushobora gutanga:
- Ivyuma bifise amabara (ku bikorwa vya laser)
- Imigero y'ukuri
- Mesa-imiterere y'ubutaka
IKIBAZO CA 3: Ni iyihe protocole yo gusukura musaba?
I: Uburyo busanzwe bwo gusukura RCA:
1. Gukuraho ibinyabuzima (H2SO4:H2O2)
2. Gusukura kw'iyon (HCl:H2O2)
3. HF-iherezo ku ruhande rw'amazi
Imisoro ishushe: Ivyuma vy'amabuye y'agaciro, Ubushinwa abahinguzi b'ivyuma vy'amabuye y'agaciro, abagurisha, uruganda
Wohereze Itohoza
Ushobora Kandi
